| 压力测量膜片的形变计算 |
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| 引用本文： | 杨仕本,张宇声,李凤宇,张广福.压力测量膜片的形变计算[J].海军工程大学学报,2003,15(6):29-32. |
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| 作者姓名： | 杨仕本 张宇声 李凤宇 张广福 |
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| 作者单位： | 海军工程大学,动力工程学院,湖北,武汉,430033 |
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| 摘 要： | 电容式压力传感器测量膜片的形变,决定了计算压力测量环节中电容值的数学模型.介绍了测量膜片形变方程的建立、推导并对压力测量膜片在不同载荷下的形变特性进行了分析和计算,克服了原有测量膜片形变规律的错误模式.
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| 关 键 词： | 传感器 压力测量 膜片 形变计算 |
| 文章编号： | 1009-3486(2003)06-0029-04 |
| 修稿时间： | 2003年1月17日 |
Deformation calculation of membrane for pressure measurement |
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| YANG Shi-ben,ZHANG Yu-sheng,LI Feng-yu,ZHANG Guang-fu.Deformation calculation of membrane for pressure measurement[J].Journal of Naval University of Engineering,2003,15(6):29-32. |
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| Authors: | YANG Shi-ben ZHANG Yu-sheng LI Feng-yu ZHANG Guang-fu |
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| Abstract: | The mathematical model which is used to calculate the capacitance in the pressure-measurement links is determined by deformation of membrane for capactive pressure sensor. The establishment and derivation of characteristic equation for membrane deformation measurement are introduced in this paper. The characteristics of membrane under differentloads are also analyzed and calculated. The error mode for deformation calculation of membrane is corrected. |
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| Keywords: | sensor pressure measurement membrane deformation calculation |
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