微陀螺仪检测平衡回路建立与验证

基于梳齿电容微结构,分析了电压驱动梳齿电容振动产生静电力的工作原理;针对微陀螺仪开环直接检测的不足,采用静电力平衡哥氏力的方法构建平衡回路,抑制哥氏振动。提取了微陀螺仪哥氏输出信号振动幅值;以哥氏振动幅值为控制量,设计了微陀螺仪检测平衡回路。仿真和实验表明构建的检测平衡回路能够有效地平衡哥氏力,抑制哥氏振动,使质量块回到平衡位置,微陀螺仪标度因数线性度和对称性有显著提高,测量范围、阈值和分辨率等性能均有不同程度改善。

Construction on Detection Balance Loop of Micro-gyroscope

Based on comb capacitance detection micro-structure,the principle of voltage drive comb capacitance vibration to generate electrostatic force is analyzed. Aiming at the deficiency of open-loop direct detection of micro-gyroscope,a method using electrostatic force to balance Coriolis force is adopted,so that the Coriolis vibration is suppressed. The Coriolis signal vibration amplitude of micro-gyroscope is extracted;with vibration amplitude as the control variable,the detection balance loop of micro-gyroscope is constructed. The simulation and experiments show that the constructed detection balance loop is able to balance effectively the Coriolis force,suppress the Coriolis vibration, and make the mass return to the balance position. The scale factor linearity and symmetry have been enhanced significantly,and the measurement range,threshold,resolution and other performances have been improved at some extent.