| MEMS磁力线聚集和垂动调制磁场传感器 |
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| 引用本文： | 田武刚,胡佳飞,潘孟春,赵建强,胡靖华.MEMS磁力线聚集和垂动调制磁场传感器[J].国防科技大学学报,2014,36(4):129-133 ,168. |
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| 作者姓名： | 田武刚 胡佳飞 潘孟春 赵建强 胡靖华 |
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| 作者单位： | 国防科学技术大学 |
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| 基金项目： | 国家自然科学基金项目（面上项目，重点项目，重大项目）;国家教育部博士点基金 |
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| 摘 要： | 针对巨磁阻和磁隧道结等磁阻元件的1/f噪声,提出一种采用微机电系统的磁力线聚集和垂动调制磁场传感器。通过将被测磁场从低频转移到几kHz,实现对磁场的DC/AC转化,从而减小了磁阻元件的1/f噪声。基于该方案采用多层膜巨磁阻元件AA002制作了磁场传感器样品,并进行了实验测试,结果表明:磁传感器样品的调制效率达到了19.3%,超过了已有的其他各种调制方案,同时低频磁场的探测能力达到槡120pT/Hz,相比巨磁阻元件AA002提高了40多倍。
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| 关 键 词： | /f噪声 调制效率 磁力线聚集器 磁场传感器 微机电系统 |
| 收稿时间： | 2013/12/2 0:00:00 |
Magnetic field sensors with MEMS magnetic flux concentration and vertical motion modulation |
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| TIAN Wugang,HU Jiafei,PAN Mengchun,ZHAO Jianqiang and HU Jinghua.Magnetic field sensors with MEMS magnetic flux concentration and vertical motion modulation[J].Journal of National University of Defense Technology,2014,36(4):129-133 ,168. |
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| Authors: | TIAN Wugang HU Jiafei PAN Mengchun ZHAO Jianqiang and HU Jinghua |
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| Institution: | College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China;College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China;College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China;College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China;College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China |
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| Abstract: | |
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| Keywords: | 1/f noise modulation efficiency magnetic flux concentrator magnetic field sensor microelectromechanical system (MEMS) |
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