音圈电机驱动的超精密快刀伺服系统的性能研究

基于快刀伺服系统的超精密金刚石车削加工技术是光学自由曲面高效率、高精密的加工手段。本文介绍了一种新的音圈电机驱动的超精密快刀伺服系统,行程达到30mm,最大加速度为920m/s₂。通过实验手段获得了系统的运动模型,来用于控制器的设计。针对一类典型的光学自由曲面-微透镜阵列进行了加工,并对加工结果进行了测试与分析。测试结果表明,所研制的快刀伺服系统达到了加工技术要求,为以后该系统在实际加工中更广泛的应用研究打下了基础。

Study on Performance of an Ultra-precision Fast Tool Servo System Driven by a Voice Coil Motor

Ultra-precision diamond turning machining technology based on Fast Tool Servo is an effective and precise process for fabricating optical freeform surfaces. This paper develops a novel fast tool servo system driven by a voice coil motor,which has the total stroke of 30mm and maximum acceleration of 920m/s₂. The system model is obtained by the experimental process, which is used to design the controller. In this paper, the micro-lens array which is a typical optical freeform surface is machined, while the experimental results are tested and analyzed. The experimental results indicate that the performances of developed FTS system satisfy the machining requirements. A good foundation for future application was built in real manufacture.