| 微机电系统技术的实际应用——微型仪器 |
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| 引用本文： | 丁衡高,袁祖武.微机电系统技术的实际应用——微型仪器[J].国防科技大学学报,2000,22(2):90-94. |
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| 作者姓名： | 丁衡高 袁祖武 |
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| 作者单位： | 国防科技大学总装备部,北京,100034 |
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| 摘 要： | 微机电系统被普遍认为是一项面向21世纪的可以广泛应用的新兴技术,作为其实际应用的微型仪器,具有传统仪器无可比拟的优势.从微型仪器入手,分别介绍了其概念、特点和市场应用,并在最后阐述了对微型仪器的几点认识.
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| 关 键 词： | 微机电系统 微型仪器 |
| 收稿时间： | 1999/12/28 0:00:00 |
The Typical Application of MEMS-Micro-Instruments |
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| DING Henggao and YUAN Zuwu.The Typical Application of MEMS-Micro-Instruments[J].Journal of National University of Defense Technology,2000,22(2):90-94. |
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| Authors: | DING Henggao and YUAN Zuwu |
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| Institution: | General Equipment Headquarters of PLA, Beijing 100034, China;General Equipment Headquarters of PLA, Beijing 100034, China |
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| Abstract: | MEMS is widely considered as one of booming new technologies, and as its typical application, micro instruments have unparalled advantage compared with traditional instruments, this article outlined the concept, characteristics and its application , some personal viewpoints about micro instruments are forwarded. |
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| Keywords: | MEMS (Micro Electronic Mechanical System) micro instrument |
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