自补偿液体静压精密转台轴承设计与实验

设计了一种用于精密转台的新型自补偿圆锥形液体静压轴承,并完成了轴承的制造与性能测试。采用流量平衡原理推导了轴承设计公式,得到了轴向和径向的最优刚度及其优化条件,计入制造误差对轴承承载性能进行了仿真,并测试了轴承的刚度和回转精度。结果表明:轴承刚度受到节流间隙与承载间隙的流阻比以及油腔间内流系数影响,流阻比存在最优值,而内流系数越小,对刚度越有利;计入制造误差的仿真模型能够有效预测轴承刚度范围。

Design and experiment of self-compensated hydrostatic precision rotary bearing

A new type of self-compensated conical hydrostatic bearing for precision rotary table was designed, manufactured and tested. The design formulas were derived based on flow equilibrium and the optimal stiffness was obtained both in the axial and the radial directions. The effect of manufacturing error on the performance was investigated, and the stiffness and revolution accuracy was experimentally tested. Results show that the bearing stiffness is influenced by the resistance ratio between the restricting gap and the bearing gap as well as the inner flow coefficient between pockets; the resistance ratio has an optimal value, and a little value of the inner flow coefficient is favorable to the stiffness; the model considering manufacturing errors can effectively predict the range of the bearing stiffness.