激光制备高附着性能的铜基类金刚石膜

提升类金刚石(Diamond-Like Carbon, DLC)膜在被保护基底上的附着能力具有明显的实际应用价值。从微观机理上分析了前期设计的Cu基多层DLC膜有效性的原因。在此基础上,研究了DLC/SiC循环层中两者厚度比例对膜层的附着性能、纳米硬度和耐磨性的影响,以优化结构、进一步提升实际应用所需的膜层性能。纳米划痕和压痕测试结果表明:随着DLC层与SiC层厚度比例的增大,多层DLC膜在Cu基上附着性能逐渐降低,但当厚度比小于2.3时,仍接近厚度400 nm的单层DLC膜在Si基上的附着性能；Cu基多层DLC膜的纳米硬度逐渐提高,同时,耐磨性接近纯DLC膜。

Cu-based diamond-like carbon film with high adhesion prepared by pulsed laser deposition

Improvement for the adhesive property of the DLC (diamond-like carbon) film on the protected substrate has obvious value in the actual application, and the reason for the validity of the Cu-based multi-layer DLC film designed in our former research was analyzed in the view of the micro-theory. Then, in order to optimize the structure of the multi-layer film and improve its performance in the practical application, the influences of the thickness ratio between the DLC layer and SiC layer in the periodic layer on the adhesion property, nano-hardness and wear property were studied. The results of the nano-scratch and nano-indentation tests show that the adhesive property and nano-hardness of the Cu-based multi-layer DLC film decreased and its nano-hardness increased, respectively, while the thickness ratio was maintained in the increasing state. Critical load of the multi-layer DLC film on the Cu substrate could approach that of the single-layer DLC film with the thickness of 400 nm on the Si substrate, when the thickness ratio was below 2.3. Meanwhile, the wear property of the Cu-based multi-layer DLC film was approximately close to that of the pure DLC film.