大型光学表面纳米精度制造

纳米精度光学表面在光刻技术、同步辐射、空间观测和惯约聚变等领域有重大需求。随着装备性能需求的不断提升,这些光学系统对光学零件面形精度和表面质量的要求几乎接近于物理极限,对光学制造技术提出了更高挑战,使光学制造成为纳米制造技术的发展前沿。通过攻克纳米量级材料去除的稳定性、复杂曲面可控补偿和装备运动轴性能设计等关键问题,掌握了以磁流变和离子束抛光技术为代表的可控柔体抛光技术,利用自主研发的抛光制造装备和工艺实现了典型光学零件的纳米精度制造,为国家相关科技项目的顺利实施提供有力的制造技术支撑。

Nanometer precision fabrication for large scale optical surfaces

The developing technology generates great demands of nano-precision optical surfaces in fields of lithography, synchrotron radiation, space observation and inertial confinement fusion (ICF). With those equipments performance rising, the surface accuracy and roughness of optical elements are further highly required, which is approaching the theoretical physical limitation. The highly raised demands bring tougher challenges for optical fabrication, meanwhile, push this technology to the frontier in the nano-precision fabrication area. Past the period of conventional polishing and computer controlled small tool polishing, the technology of optical manufacture has developed to controllable compliant tools polishing, which is represented by Magnetorheological polishing (MRF) and Ion Beam Figuring (IBF). The polishing tools of those new techniques, known as the latest ones, could be controlled flexibly, that would enhance the adaptability of aspheric surface curvature, as well as the long-term stability of removal function. Utilizing the self-innovated controllable flexible polishing technology and facilities, National University of Defense Technology has realized nano-precision fabrication of typical optical elements and by which, has provided strong support to relative science programs of our country, in terms of fabrication technology.