磁控溅射工艺对CrN基复合涂层微观结构及摩擦学性能的影响

采用闭合场非平衡磁控溅射技术在不锈钢基体上制备了不同质量分数Mo的CrMoN复合涂层。采用X射线衍射仪（XRD）、扫描电子显微镜（SEM）、能谱仪（EDX）和光电子能谱仪（XPS），系统分析了CrMoN复合涂层的相结构、表面形貌、成分、原子化合价价态等，结果表明：添加Mo后，CrMoN涂层的择优取向由CrN涂层的（220）转变为（200），CrMoN涂层中的Mo原子取代了CrN晶格中的Cr原子，形成（Cr，Mo）N置换固溶体。采用Nano Test 600硬度测试仪测定了CrMoN复合涂层的纳米硬度，结果表明：由于CrN相和MoN两种硬相的协同作用，使得CrMoN复合涂层的纳米硬度值增大。采用多功能摩擦磨损试验机测定了CrN涂层及CrMoN复合涂层的摩擦因数，结果表明：CrMoN复合涂层的摩擦因数低于CrN涂层，磨损过程中由于摩擦热反应生成大量MoO3，使得复合膜的摩擦因数降低，起到了一定的润滑效果，降低了磨损量。

Effect of Magnetron Sputtering on Microstructure and Tribological Properties of CrN-based Composite Coatings

Different Mo mass fraction of CrMoN composite coatings are deposited on steel substrates using closed-field unbalanced magnetron sputtering technique. The phase structure, surface morphology, com- ponent and atomic valence states of CrMoN composite coatings are tested by EDX, XRD, SEM and XPS respectively. The experimental results show that the preferential growth orientation of CrMoN coatings is changed from CrN （220） to （200） after the addition of Mo element. The CrMoN composite coatings form a substitutional solid solution of （Cr, Mo）N where Mo replaces Cr in CrN crystal. The mechanical proper- ty experiments are carried out on the nanotest 600 hardness-testing device. The hardness of CrMoN com- posite coatings enhances due to the synergistic effect of CrN and MoN hard phases. The friction coeffi- cient of CrN and CrMoN composite coatings are tested by muhifunctional friction wear testing machine, showing that the friction coefficient of CrMoN composite coatings is lower than that of CrN composite coat- ings, MoO3 is formed in wear process due to friction heating so that the friction coefficient is reduced, and the lubricating effects are achieved.