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非晶碳类金刚石薄膜摩擦学特性及其应用
引用本文:张伟,张纾,柳清亮,刘仲谦,徐滨士.非晶碳类金刚石薄膜摩擦学特性及其应用[J].装甲兵工程学院学报,2006,20(4):83-87.
作者姓名:张伟  张纾  柳清亮  刘仲谦  徐滨士
作者单位:装甲兵工程学院装备再制造技术国防科技重点实验室,北京,100072
摘    要:综合地介绍了类金刚石膜研究现状,着重说明了非晶碳类金刚石薄膜的摩擦学特性,分析了沉积方法、掺杂元素、摩擦环境、基体及对偶材料对其摩擦学特性的影响。最后,简要说明了非晶碳类金刚石膜应用情况。

关 键 词:非晶碳类金刚石  摩擦磨损性能  物理与化学气相沉积
文章编号:1672-1497(2006)04-0083-05
修稿时间:2006年4月20日

Tribological Properties and Application of a-C Diamond-like Carbon Films
ZHANG Wei,ZHANG Shu,LIU Qing-liang,LIU Zhong-qian,XU Bin-shi.Tribological Properties and Application of a-C Diamond-like Carbon Films[J].Journal of Armored Force Engineering Institute,2006,20(4):83-87.
Authors:ZHANG Wei  ZHANG Shu  LIU Qing-liang  LIU Zhong-qian  XU Bin-shi
Abstract:Based on the research results of the authors,the current research of DLC films was introduced.The remarkable tribological properties of a-C Diamond-like carbon films were presented.The influence of deposi- tion methods,incorporated elements,tribo-environments,substrate and couple materials on tribological prop- erties of the DLC films was discussed in detail.Finally,the application of DLC films was introduced briefly.
Keywords:a-C diamond-like carbon  friction and wear properties  physical and chemical vapor deposition
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