| 光波导微模具飞切加工工艺 |
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| 引用本文： | 彭文强,吴宇列,李圣怡,刘勇. 光波导微模具飞切加工工艺[J]. 国防科技大学学报, 2011, 33(5): 54-58 |
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| 作者姓名： | 彭文强 吴宇列 李圣怡 刘勇 |
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| 作者单位： | 国防科技大学机电工程与自动化学院,湖南长沙,410073 |
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| 基金项目： | 国家自然科学基金重点资助项目(50735007) |
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| 摘 要： | 针对目前模压制作工艺中高精度的光波导微模具加工工艺比较复杂的问题,基于金刚石超精密机械加工技术在光学元件微结构的广泛应用提出了光波导微模具的金刚石飞切高效快速的加工方法.通过超精密飞切加工系统以硬铝为模具材料进行了工艺优化的正交试验.试验结果表明:背吃刀量对光波导微结构表面质量的影响相当敏感,主轴转速对微结构表面质量的...
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| 关 键 词： | 光波导 飞切 微模具 表面粗糙度 |
| 收稿时间： | 2011-03-05 |
Optical Waveguide Microstructure Mould Made by Fly-cutting Technique |
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| PENG Wenqiang,WU Yulie,Li Shengyi and LIU Yong. Optical Waveguide Microstructure Mould Made by Fly-cutting Technique[J]. Journal of National University of Defense Technology, 2011, 33(5): 54-58 |
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| Authors: | PENG Wenqiang WU Yulie Li Shengyi LIU Yong |
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| Affiliation: | PENG Wen-qiang,WU Yu-lie,Li Sheng-yi,LIU Yong(College of Mechatronics Engineering and Automation,National Univ.of Defense Technology,Changsha 410073,China) |
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| Abstract: | The fly-cutting technique has wide application in optical microstructure manufacture.A unique method is put forward to achieve fast and high quality optical waveguide microstructure mould manufacture with fly-cutting technique after an analysis of the present complicated process technique.Fly-cutting orthogonal test was conducted to get the optimal process parameters for machining the waveguide mould.It is found that the microstructure surface roughness is sensitive to the cut depth first,the next two are t... |
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| Keywords: | optical waveguide fly-cutting microstructure mould surface roughness |
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