| 精确测量薄层厚度的同态信号处理方法 |
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| 引用本文： | 李素芝,杨建华. 精确测量薄层厚度的同态信号处理方法[J]. 国防科技大学学报, 1994, 16(2): 77-81 |
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| 作者姓名： | 李素芝 杨建华 |
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| 作者单位： | 国防科技大学电子技术系 |
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| 摘 要： | 针对精确测量薄层厚度的要求，本文提出一种新的同态信号处理的方法，这种方法在于得出被测信号能量谱ＥＳ的对数导数的付里叶反变换的包络。仿真结果表明，估计值与实际值非常相近。
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| 关 键 词： | 同态信号处理；能量谱；付里叶变换 |
| 收稿时间： | 1993-11-25 |
A Homomorphic Signal Processing Method for Accurate Thickness Measurement of Thin Layers |
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| Li Suzhi and Yang Jianhua. A Homomorphic Signal Processing Method for Accurate Thickness Measurement of Thin Layers[J]. Journal of National University of Defense Technology, 1994, 16(2): 77-81 |
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| Authors: | Li Suzhi and Yang Jianhua |
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| Abstract: | A homomorphic signal processing method is presented for aecurate thickness measurement of thin layers.The method consists in taking the envelope of the inverse Fourier Transform of a corrected logarithnic derivative of the energy spectrum(ES) of the measured signal. Simulations show execllent agreement between estimated and actual values . |
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| Keywords: | ss: homomorphic signal processing energy spectrum Fourier transform |
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