超精密加工在线检测与误差补偿的理论与方法

超精密加工技术是高新技术、现代机械、电子产业以及国防工业的重要支柱，已成为技术发达国家重要的竞争目标。我系自１９８２年以来开展超精密加工技术的研究已有十多个年头了，取得了重要进展和重大突破。本文就所进行的研究工作，综合介绍了超精密加工中的若干理论与方法，包括形状误差在线检测的误差分离、误差补偿控制、微进给机构的非线性建模、微位移检测等内容，最后介绍了我系所取得的主要成果。

Theory and Methods of On-line Measurement and Error Compensation of Ultraprecision Machining

Some theory and methods in ultraprecision machining are presented. Error separation and error compensatory control of roundness,straightness and cylindricity are included. And nonlinear modeling of micro-driven equipment and micro-displacement measurement are also comprised. Finally some main achievements in scientific research are briefly introduced.