光学阵列器件的慢刀伺服车削加工技术

慢刀伺服技术是相对于快刀伺服提出的方法.采用C轴、X轴、Z轴联动的方法在极坐标或圆柱坐标内进行加工.光学阵列如微透镜阵列、微反射镜阵列在高速数据、声音和视频信号传输中具有重要作用.将光学阵列看作一个自由曲面,使用慢刀伺服车削技术一次加工成形,可以解决传统加工中将光学阵列分块加工后拼装和调整的困难.但是由于光学阵列表面形状复杂,其表面法线的突变可能会使机床运动超出伺服轴执行能力.根据慢刀伺服加工技术的特点,建立了伺服轴执行能力限制曲线,研究了不同刀具半径补偿方式对加工的影响.实验结果表明,根据机床伺服轴执,厅能力合理选择刀具半径补偿方式可实现微光学阵列器件高精度加工.

Fabrication of Array Lens Optical Component by Using of Slow Tool Servo Diamond Turning

Slow Slide Servo, in comparison with Fast Slide Servo, is a novel machining process capable of generating freeform optical surfaces or rotationally non-symmetric surfaces at high level of accuracy. It is processed in the polar and cylinder coordinates with the method of C, X and X axes. Micro-optical devices, e.g., micro lenses, micro mirrors, play an important role in high speed data, voice and video signal transmissions. Micro array lens can be treated as a freeform surface and therefore can be machined by slow tool servo method. In the tool radius compensation, the discontinuity of normal direction may cause the lathe motion beyond servo axis' capability. In the current research, servo axes limitation motion capability was analyzed and two tool radius compensation methods were studied. Experiments show that by correctly selecting tool radius compensation method, slow tool servo can manufacture array lens in a single operation and accurate geometry and optical surface finish can be obtain.