| 离子束抛光加工矩形离轴非球面镜 |
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| 引用本文： | 廖文林,戴一帆,周林,王建敏,袁征,解旭辉.离子束抛光加工矩形离轴非球面镜[J].国防科技大学学报,2011,33(1):100-104. |
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| 作者姓名： | 廖文林 戴一帆 周林 王建敏 袁征 解旭辉 |
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| 作者单位： | 国防科技大学机电工程与自动化学院; |
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| 基金项目： | 国家自然科学基金资助项目(50775215,50975281) |
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| 摘 要： | 采用一种简单的方法使用线性三轴离子束系统实现了矩形离轴非球面镜的抛光加工.根据离子束材料去除机理,分析了去除函数的法向材料去除特性,并且以去除函数束径、峰值去除速率和体积去除速率为指标,评价了入射角的小扰动鲁棒性.利用相关的分析和实验结果,对矩形离轴镜的抛光加工进行了合理的简化,并在自行研制的离子束抛光机床上进行了修形...
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| 关 键 词： | 离子束抛光 离轴非球面 去除函数 材料去除特性 |
| 收稿时间： | 8/6/2010 12:00:00 AM |
Ion Beam Figuring for Rectangular Off-axis Aspheric Mirrors |
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| LIAO Wen-lin,DAI Yi-fan,ZHOU Lin,WANG Jian-min,YUAN Zheng,XIE Xu-hui.Ion Beam Figuring for Rectangular Off-axis Aspheric Mirrors[J].Journal of National University of Defense Technology,2011,33(1):100-104. |
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| Authors: | LIAO Wen-lin DAI Yi-fan ZHOU Lin WANG Jian-min YUAN Zheng XIE Xu-hui |
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| Institution: | LIAO Wen-lin,DAI Yi-fan,ZHOU Lin,WANG Jian-min,YUAN Zheng,XIE Xu-hui(College of Mechatronics Engineering and Automation,National Univ.of Defense Technology,Changsha 410073,China) |
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| Abstract: | A simple method of ion beam figuring was successfully employed for processing rectangular off-axis aspheric mirror.Based on the material removal mechanism,the normal removal characteristic was analyzed.Beam diameter,peak removal rate and volume removal rate are the three factors to evaluate the robustness of removal function with respect to little disturbance of incidence angle.According to the results of analyses and experiments,the method of processing rectangular off-axis aspheric mirror by ion beam figu... |
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| Keywords: | ion beam figuring off-axis asphere mirror removal function material removal characteristics |
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