光学图样光电探测的动态仿真

以圆孔夫琅和弗衍射图样的光电探测为例，介绍了对光学图样的光电探测进行动态仿真的方法。

Dynamic Simulation for Photodetection of an Optical Pattern

Since the detecting area of any photodetector can't be zero,in reality the photodetection for an optical pattern is always an area-detection.If the intensity distribution to the left and the right of the characteristic point of the edge in the detected optical pattern is unsymmetrical then a mistake will arise from this kind area-detection for the point position lead in detormining the position of the edge.and thus will produce the edge checkout error.But by means of the dynamic simulation for the photodetection of the optical pattern,the edge checkuout error may be previously calculated.The results of the simulation may be immediately used for the correction of the error.In this paper we take the photodetection of the Fraunhoffer diffraction pattern from a circular aperture for example,introduce the method of the dynamic simulation for the photodetection of the optical pattern.