| 超精密气浮式电容传感器系统 |
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| 引用本文： | 戴一帆,王新峰,吴宇列. 超精密气浮式电容传感器系统[J]. 国防科技大学学报, 1999, 21(5): 91-94 |
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| 作者姓名： | 戴一帆 王新峰 吴宇列 |
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| 作者单位： | 国防科技大学机械电子工程与仪器系!长沙410073 |
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| 摘 要： | 介绍了一种高精度、高分辨率的超精密气浮式电容传感器。该系统将具有方形导轨的气浮测头和超小型电容传感器结合在一起,既保证了测头的高分辨率,又体现了电容传感器的高精度、高频响的特点,是一种较好的用于超精密接触测量的测量系统
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| 关 键 词： | 气浮测头 接触测量 电容传感器 |
| 收稿时间： | 1999-03-01 |
Ultraprecision Air Bearing Capacitive Sensor System |
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| Dai Yifan,Wang Xinfeng and Wu Yulie. Ultraprecision Air Bearing Capacitive Sensor System[J]. Journal of National University of Defense Technology, 1999, 21(5): 91-94 |
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| Authors: | Dai Yifan Wang Xinfeng Wu Yulie |
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| Affiliation: | Department of Mechatronics and Instrumentation, NUDT, Changsha, 410073;Department of Mechatronics and Instrumentation, NUDT, Changsha, 410073;Department of Mechatronics and Instrumentation, NUDT, Changsha, 410073 |
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| Abstract: | This paper presents an ultraprecision air bearing capacitive sensor with high resolution.It combines the air bearing gauge head with a square guideway with the microminiature capacitive sensor, ensuring high accuracy and high frequence response It's suitable for ultraprecision contact measurement. |
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| Keywords: | air bearing gauge head contact measurement capacitive sensor |
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