| Al-Mn 多层膜离子束混合 |
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| 引用本文： | 王叔琪. Al-Mn 多层膜离子束混合[J]. 海军工程大学学报, 1998, 0(3) |
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| 作者姓名： | 王叔琪 |
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| 摘 要： | 离子束混合是一种材料改性和新材料研制的有效方法，本实验用Ａｒ＋离子束对Ａｌ－Ｍｎ多层薄膜在室温下进行轰击使其非晶化，并对样品电阻率随离子注入剂量及温度的变化关系进行原位测量．电阻温度系数ＴＣＲ和ＴＥＭ观测证实了样品离子束混合后电性能和结构发生改变生成了非晶相．
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| 关 键 词： | 离子束混合；多层膜；原位测量 |
Ion Beam Mixing on Al-Mn Multilayer Film |
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| Wang Shuqi. Ion Beam Mixing on Al-Mn Multilayer Film[J]. Journal of Naval University of Engineering, 1998, 0(3) |
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| Authors: | Wang Shuqi |
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| Abstract: | Ion beam mixing is a powerful way to improve material properties and synthesize new material. Al-Mn multilayer films deposited on the substrates mixed by Ar + beam with energy 120 KeV at room temperature. The electrical resistivity of the samples and thier resistivity relations with ion beam dose and temperature are mesured in situ. The temperature coefficient of resistivity(TCR) and TEM odservation indicate the presence of the amorphous phase in the samples after mixing. |
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| Keywords: | Ion beam mixing Multilayer film In situ measurement |
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