| 离子镀TiN涂层工艺参数优化及工作距离对表面质量的影响 |
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| 引用本文： | 杜军,张平,赵军军,蔡志海,郝根根. 离子镀TiN涂层工艺参数优化及工作距离对表面质量的影响[J]. 装甲兵工程学院学报, 2008, 22(1): 83-87 |
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| 作者姓名： | 杜军 张平 赵军军 蔡志海 郝根根 |
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| 作者单位： | 装甲兵工程学院,装备再制造技术国防科技重点试验室,北京,100072 |
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| 摘 要： | 采用多弧离子镀(multi-arc deposition)沉积TiN涂层,分析工艺参数对涂层表面质量的影响。首先以硬度为考核指标,设计了Ti弧流、N2流量、Ar流量、烘烤温度和偏压的5因素、4水平L16(45)正交试验,优化工艺参数。然后分析了优化工艺参数条件下,工件到靶材的距离(工作距离)对涂层表面质量的影响。采用SEM分析了表面形貌,通过截面形貌确定了涂层厚度;采用Nano-indentation测定了涂层硬度。结果发现:5个因素对涂层硬度的影响程度不同,影响硬度的因素主次顺序为Ti弧流—Ar流量—偏压—烘烤温度—N2流量;试验条件下,5因素的最优水平依次为70 A,10 sccm,40 V,350℃,44 sccm;存在最佳工作距离(约30 cm),使涂层表面质量最佳。
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| 关 键 词： | 多弧离子镀 TiN涂层 表面质量 |
| 文章编号： | 1672-1497(2008)01-0083-05 |
| 修稿时间： | 2007-07-01 |
Analysis of Optimal Deposition Parameters of TiN Coatings and Effect of Working Distance on Surface Quality |
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| DU Jun,ZHANG Ping,ZHAO Jun-jun,CAI Zhi-hai,HAO Gen-gen. Analysis of Optimal Deposition Parameters of TiN Coatings and Effect of Working Distance on Surface Quality[J]. Journal of Armored Force Engineering Institute, 2008, 22(1): 83-87 |
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| Authors: | DU Jun ZHANG Ping ZHAO Jun-jun CAI Zhi-hai HAO Gen-gen |
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| Affiliation: | (National Defense Key Laboratory for Remanufacturing Technology; Academy of Armored Force Engineering; Beijing 100072; China); |
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| Abstract: | TiN coatings are deposited by multi-arc deposition and the process parameters effects on surface quality are analyzed.Firstly,L16(45) orthogonal experiment is designed to optimize the parameters of TiN coatings,five affecting factors of coating hardness are presented,namely,Ti flux,N2 flux,Ar flux,temperature and bias voltage.Then the effects of distance between target and substrate(working distance) on the surface quality are analyzed.The microstructure,surface morphologies and nano-hardness are observed b... |
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| Keywords: | multi-arc ion plating TiN coating surface quality |
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