静电放电防护器件研究综述

静电放电（Electrostatic Discharge,ESD）严重影响当今微电子器件的可靠性,使用静电放电防护器件是提高电路ESD可靠性的一种重要途径。随着微电子技术的高速发展,出现了多种新型防护器件。文章介绍了当前最常用的几种静电放电防护器件（瞬态电压抑制管（TVS）、可控硅整流器件（SCR）、NMOS器件）的工作机理及其国内外研究现状和发展趋势。开展静电放电防护器件研究,对提高静电放电防护器件性能及设计新型静电放电防护器件有着重要指导作用。     

基于加速寿命试验的晶体管静电放电潜在性失效的研究

对高频小功率硅双极结型晶体管2SC3356进行静电放电试验,并利用加速寿命试验原理对两组器件进行加速寿命试验。采用Arrhenius模型对试验结果进行计算分析,发现低于损伤阈值的ESD注入可以使器件的寿命缩短,得出ESD可以在高频小功率硅双极结型晶体管内部造成潜在性失效,使得器件寿命缩短。     

A reusable planar triggered spark-gap switch batched-fabricated with PCB technology for medium-and low-voltage pulse power systems

Triggered spark-gap switch is a popular discharge switch for pulse power systems. Previous studies have focused on planarizing this switch using thin film techniques in order to meet the requirements of compact size in the systems. Such switches are one-shot due to electrodes being too thin to sufficiently resist spark-erosion. Additionally, these switches did not employ any structures in securing internal gas composition, resulting in inconsistent performance under harsh atmospheres. In this work, a novel planar triggered spark-gap switch (PTS) with a hermetically sealed cavity was batched-prepared with printed circuit board (PCB) technology, to achieve reusability with low cost. The proposed PTS was inspected by micro-computed tomography to ensure PCB techniques meet the requirements of machining precision. The results from electrical experiments demonstrated that PCB PTS were consistent and reusable with lifespan over 20 times. The calculated switch voltage and circuit current were consistent with those derived from real-world measurements. Finally, PCB PTS was used to introduce hexanitrostilbene (HNS) pellets in a pulse power system to verify its performance.     

Research on fuze microswitch based on corona discharge effect

Abnormal voltages such as electrostatic, constant current, and strong electromagnetic signals can erro-neously trigger operation of MEMS pyrotechnics and control systems in a fuze, which may result in casualties. This study designs a solid-state micro-scale switch by combining the corona gas discharge theory of asymmetric electric fields and Peek's Law. The MEMS switch can be transferred from "off" to"on" through the gas breakdown between the corona electrodes. In the model, one of the two electrodes is spherical and the other flat, so a non-uniform electric field is formed around the electrodes. The theoretical work is as follows. First, the relation among the radius of curvature of the spherical electrode, the discharge gap, and the air breakdown voltage is obtained; to meet the low voltage (30-60 V) required to drive the MEMS switch, the radius of curvature of the spherical electrode needs to be 10-50 μm and the discharge gap between the two electrodes needs to be 9-11 μm. Second, the optimal ratio ε is introduced to parameterize the model. Finally, the corona discharge structural parameters are determined by comparing the theoretical and electric field simulation results. The switch is then fabricated via MEMS processing. A hardware test platform is built and the performing chip tested. It is found that when the electrode gap is 9 μm, the electrostatic voltage is at least 37.3 V, with an error of 2.6% between the actual and theoretical air breakdown voltages. When the electrode gap is 11 μm, the electrostatic voltage is at least 42.3 V, with an error of 10.5% between the actual and theoretical air breakdown voltages. Both cases meet the design requirements.     

电晕放电辐射场若干特性分析

为了研究电晕放电辐射场若干特性,首先进行了电晕放电时电晕电流的理论分析,研究了电晕电流的波形随电压变化情况。然后在采用针-板电极物理实验模型的基础上进行了电晕放电实验研究,分析了放电针上的充电电压对脉冲电流的影响,并确定了辐射场随传播距离的变化规律以及放电重复率随电压的变化情况。实验结果发现,当针为负极性时先发生放电,但正极性下先发生火花放电;电晕放电辐射场与距离成反比关系;放电重复率随着电压的增大而增大。     

IEC标准与ESD抗扰度实验方法研究

对ESD抗扰度实验方法和 2种ESD模拟器进行了系统的研究, 发现IEC61000-4-2标准规定的静电放电抗扰度实验方法和实验用的ESD模拟器存在严重的问题。针对这些问题并结合当前国外学者研究的有关结论,研制了一种更符合实际需要的ESD抗扰度检测试验方法和实验装置。利用新研制的实验平台对瑞士Schaffner公司制造的NSG435ESD模拟器和日本Noiseken公司制造的ESS-200AXESD模拟器进行了比较研究, 对模拟器内部高压继电器动作产生的辐射场造成实验结果偏差问题进行了测试分析。利用该实验装置分别以手动控制模拟器和自动控制装置控制模拟器完成了空气放电过程。对空气放电电流波形的重复性进行了研究, 证明利用这种平台可以有效地控制空气放电的重复性。     

一种用于ESD测试的PLC单轴运动控制台研究

研制了一种以可编程控制器 (PLC) 作为控制单元的单轴控制台。这种单轴控制台有效控制了静电放电(ESD) 模拟器空气放电电极的运动状态, 为ESD测试实验提供了一种新的手段, 并与手持放电方式进行了实验比较。     

静电放电对微机接口电路干扰效应研究

为研究静电放电(ESD)对微机接口电路的干扰效应,设计了一种单片机系统串行数据传输电路试验模型。利用静电放电模拟器对自行设计的单片机系统进行了效应试验,并对测得的试验数据进行了分析,得出了这类典型串口通讯在静电放电环境下的一些规律。     

电晕放电辐射信号分析的小波基函数选取

研究电晕放电辐射信号既有利于消除其危害又有助于加强对其利用。针对小波变换提出在不同情况下对不同类型的电晕放电进行分析时,选取小波基函数的方法,理论上可以通过信号与小波波形的匹配或者通过计算信号与小波相关系数的方法来确定,而在不确定放电类型时可进行实际分析。     

对空气静电放电的频域研究

利用辐射电磁场的推迟势方程对空气静电放电的电磁场频谱进行了理论推导,对放电电流峰值和金属小环上的耦合电压峰-峰值进行了测量,使用数字存储示波器记录了放电电流和耦合电压的波形。利用测量结果对静电放电的电磁场频谱进行了理论计算,比较了不同放电电压下耦合电压的幅度谱和功率谱,结果表明:空气静电放电的能量主要集中在直流到2.0 GHz的频段内。