微机电系统技术的实际应用——微型仪器

微机电系统被普遍认为是一项面向21世纪的可以广泛应用的新兴技术,作为其实际应用的微型仪器,具有传统仪器无可比拟的优势.从微型仪器入手,分别介绍了其概念、特点和市场应用,并在最后阐述了对微型仪器的几点认识.     

基于小波神经网络的MEMS陀螺输出预测方法

为了解决弹载MEMS陀螺实时输出预测问题,提高陀螺输出预测精度并减小计算量,通过分析弹载陀螺信号时间序列特性,结合小波分析和神经网络两种方法的优势,提出了一种基于小波神经网络的MEMS陀螺输出预测方法。选取并优化神经网络结构参数,利用实测陀螺数据对建立的小波神经网络进行训练,并预测出未来一段较短时间的陀螺输出值。与陀螺实测值和ARMA模型预测结果的对比发现,小波神经网络方法有效地提高了MEMS陀螺输出预测的精度、减小了计算量,从而验证了该方法的有效性和精度。     

Research on a MEMS pyrotechnic with a double-layer barrier safety and arming device

As an essential component of ammunition, pyrotechnics can control ignition with high reliability. However, due to limits of fabrication technology, traditional pyrotechnics are bulky. To achieve both functionality and miniaturization, MEMS pyrotechnics integrate initiator, safety-and-arming (S&A) device and lead charge and keep all components within a small size. MEMS S&A devices, as the core component to ensure system safety, are difficult to achieve active and rapid response to control signals with high safety and reliability. In order to overcome the difficulty, we propose the design and characterization of a MEMS pyrotechnic with a double-layer barrier S&A device. The MEMS pyrotechnic is a high-integrated device with an overall size of 13.4 × 8.5 × 5.2 mm³. The initiator is a NiCr bridge foil covered with an Al/CuO energetic film, which can generate flame when ignited by an excitation voltage. To match the flame energy, lead styphnate is chosen in this study as the lead charge. The S&A device contains four semi-circular barriers, which are directly driven by V-shape electro-thermal actuators to gain active control of the pyrotechnics' ignition condition with rapid response. To improve the system's reliability, the four barriers are axisymmetrically placed in two layers, two barriers for each layer, to constitute a double-layer structure with a thickness of 100 μm. The ignition test results show that the S&A device can prevent the initiator from detonating the lead charge in safety condition. In arming condition, the lead charge will be detonated.     

Research on design and firing performance of Si-based detonator

For the chip integration of MEMS (micro-electromechanical system) safety and arming device, a miniature detonator needs to be developed to reduce the weight and volume of explosive train. A Si-based micro-detonator is designed and fabricated, which meets the requirement of MEMS safety and arming device. The firing sensitivity of micro-detonator is tested according to GJB/z377A-94 sensitivity test methods: Langlie. The function time of micro-detonator is measured using wire probe and photoelectric transducer. The result shows the average firing voltage is 6.4 V when the discharge capacitance of firing electro-circuit is 33 μF. And the average function time is 5.48 μs. The firing energy actually utilized by Si-based micro-detonator is explored.     

微加速度计研究的进展

介绍了微加速度计的基本原理以及国内外常见的各种微加速度计的结构形式,包括压电式、电容式、扭摆式、隧道式等,分析了这些传感器的基本特点,总结微加速度计发展中存在的一些问题,并提出一些解决关键问题的措施,预测微加速度计未来的发展趋势。     

Research on fuze microswitch based on corona discharge effect

Abnormal voltages such as electrostatic, constant current, and strong electromagnetic signals can erro-neously trigger operation of MEMS pyrotechnics and control systems in a fuze, which may result in casualties. This study designs a solid-state micro-scale switch by combining the corona gas discharge theory of asymmetric electric fields and Peek's Law. The MEMS switch can be transferred from "off" to"on" through the gas breakdown between the corona electrodes. In the model, one of the two electrodes is spherical and the other flat, so a non-uniform electric field is formed around the electrodes. The theoretical work is as follows. First, the relation among the radius of curvature of the spherical electrode, the discharge gap, and the air breakdown voltage is obtained; to meet the low voltage (30-60 V) required to drive the MEMS switch, the radius of curvature of the spherical electrode needs to be 10-50 μm and the discharge gap between the two electrodes needs to be 9-11 μm. Second, the optimal ratio ε is introduced to parameterize the model. Finally, the corona discharge structural parameters are determined by comparing the theoretical and electric field simulation results. The switch is then fabricated via MEMS processing. A hardware test platform is built and the performing chip tested. It is found that when the electrode gap is 9 μm, the electrostatic voltage is at least 37.3 V, with an error of 2.6% between the actual and theoretical air breakdown voltages. When the electrode gap is 11 μm, the electrostatic voltage is at least 42.3 V, with an error of 10.5% between the actual and theoretical air breakdown voltages. Both cases meet the design requirements.     

Performances and direct writing of CL-20 based ultraviolet curing explosive ink

A new type of explosive ink formulation that can be quickly cured was prepared with unsaturated polyester as binder,styrene as active monomer,2,4,6-trimethylbenzoyl-diphenylphosphine oxide as photoinitiator,and hexanitrohexaazaisowurtzitane (CL-20) as the main explosive.Then the explosive ink direct writing technology was used to charge the micro-sized energetic devices,the curing mechanism of the explosive ink was discussed,and the microstructure,safety performance and explosive transfer performance of the explosive ink molded samples were tested and analyzed.Results indicate that the composite material has a fast curing molding speed,its hardness can reach 2H within 8 min.The crystal form of CL-20 in the molded sample is still ε type.The CL-20 based W-curing explosive ink formulation has good compatibility,its apparent activation energy is increased by about 3.5 kJ/mol.The composite presents a significant reduction in impact sensitivity and its characteristic drop height can reach 39.8 cm,which is about 3 times higher than the raw material.When the line width of charge is 1.0 mm,the critical thickness of the explosion can reach 0.015 mm,and the explosion velocity is 7129 m/s when the charge density is 1.612 g/cm3.     

MEMS磁力线聚集和垂动调制磁场传感器

针对巨磁阻和磁隧道结等磁阻元件的1/f噪声,提出一种采用微机电系统的磁力线聚集和垂动调制磁场传感器。通过将被测磁场从低频转移到几kHz,实现对磁场的DC/AC转化,从而减小了磁阻元件的1/f噪声。基于该方案采用多层膜巨磁阻元件AA002制作了磁场传感器样品,并进行了实验测试,结果表明:磁传感器样品的调制效率达到了19.3%,超过了已有的其他各种调制方案,同时低频磁场的探测能力达到槡120pT/Hz,相比巨磁阻元件AA002提高了40多倍。     

基于LPC3250的小型无人机航姿系统的设计

航向和姿态是无人机飞行控制系统的重要参数,传感器系统是整个无人机飞行控制系统的核心。采用LPC3250ARM9处理器、MEMS传感器以及存储器设计无人机航姿系统,完成传感器的数据采集与处理,获得无人机的航姿信息,最后进行数据传输。将Linux操作系统嵌入到无人机航姿系统中,实现系统的实时任务调度和进程管理。结果显示,该系统达到了无人机航姿系统的小型化、低功耗、高精度的目标。     

MEMS微陀螺研究与发展述评

本文概述了MEMS微陀螺的典型军事应用及需求。总结了国内外研究概况。并就我国开展MEMS微陀螺的研究提出建议。